FRINGING-FIELD, PARALLEL PLATE ACTUATOR
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United States of America
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Jan 30, 2025
app pub date -
Oct 7, 2024
filing date -
Oct 7, 2024
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Abstract
A microelectromechanical systems (MEMS) device includes a base plate including a first electrode and a second electrode and a top layer. The MEMS device also includes a perforated hinge plate supporting the top layer. The perforated hinge plate includes first and second flexural arms permitting the perforated hinge plate and the top layer to move relative to the base plate. The perforated hinge plate has a first perforation that includes the first electrode and has a footprint that is larger than a footprint of the first electrode, and the perforated hinge plate has a second perforation that includes the second electrode and has a footprint that is larger than a footprint of the second electrode. Additionally, the MEMS device includes a first support post to which the first flexural arm is connected and a second support post to which the second flexural arm is connected.
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