Importance

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Abstract

The present disclosure relates to semiconductor devices, including a semiconductor device including a backside power delivery network (BSPDN). An example semiconductor device includes a substrate comprising a first surface and a second surface opposite to each other, a first active pattern on the first surface, a first gate structure intersecting the first active pattern, and first and second back wiring patterns disposed on the second surface at a same height from the substrate. The first back wiring pattern comprises a first extension portion and a second extension portion each extending in a first direction, and a connection portion extending in a second direction intersecting the first direction to connect the first extension portion to the second extension portion. The second back wiring pattern is spaced apart from the first extension portion in the second direction, and spaced apart from the connection portion in the first direction.

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First Claim