ACOUSTIC WAVE RESONATOR WITH PATTERNED CONDUCTIVE LAYER FOR TRANSVERSE MODE SUPPRESSION
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Oct 7, 2024
filing date -
Oct 7, 2024
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Abstract
Aspects of this disclosure relate to an acoustic wave resonator with a patterned conductive layer. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode over the piezoelectric layer, and a temperature compensation layer over the interdigital transducer electrode. The interdigital transducer electrode can include a bus bar and fingers extending from the bus bar. The fingers can each include an edge portion and a body portion. The patterned conductive layer can overlap the edge portions of the fingers. The patterned conductive layer can conductive portions that are spaced apart from each other. A portion of the temperature compensation layer can be positioned between the patterned conductive layer and the interdigital transducer electrode.
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