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Abstract

A high-frequency power supply (10) uses one pulse conversion/variable gain amplification unit (23) to perform two processing steps which are converting an RF signal into pulses and controlling an output level, and uses one control signal (27) to perform the pulse conversion and the output level control by the pulse conversion/variable gain amplification unit (23), thereby obviating the need for a modulation unit, which is a factor in the generation of jitter, overshoot, and undershoot, and reducing the number of control lines (29) for sending the control signal (27) to one control line. Due to this configuration, the jitter, overshoot, and undershoot generated in an RF pulse signal can be prevented, and the RF-signal pulse conversion and output level control are performed simultaneously using one control line (29).

First Claim