VALVES FOR CHARGED PARTICLE BEAM MICROSCOPE, VALVE MEMBER AND CHARGED PARTICLE BEAM MICROSCOPE
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Jul 12, 2024
filing date -
Jul 12, 2024
priority date (Note) -
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Abstract
A valve for a charged particle beam microscope comprises: a valve seat comprising an opening; and a valve member comprising a valve member body and a sealing ring on a first surface of the valve member body. The valve member is movable between a first position where the sealing ring seals around the opening and a second position where the valve member is spaced apart from the opening. The valve member further comprises an electrically conducting shielding member extending at least at a side surface of the valve member body facing the opening in the second position.
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