MEASUREMENT APPARATUS THAT MEASURES POSITION INFORMATION OF MEASUREMENT TARGET IN PREDETERMINED DIRECTION
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Oct 7, 2024
filing date -
Oct 7, 2024
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Abstract
A measurement apparatus measures position information of a measurement target in a first direction. The apparatus comprises a scope configured to capture an image of the measurement target and generate image data, and a processor configured to obtain, based on the image data, the position information of the measurement target in the first direction. The processor is configured to determines the position information of the measurement target in the first direction based on: provisional position information of the measurement target in the first direction obtained from the image data, and using a correction value which is output from a model by inputting, in the model, a feature quantity, of the image data, related to a second direction different from the first direction.
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