TEMPERATURE ADJUSTMENT SYSTEM AND ELECTRONIC COMPONENT TESTING APPARATUS
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Nov 9, 2021
filing date -
Nov 9, 2021
priority date (Note) -
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Abstract
A temperature adjustment system for adjusting a temperature of a DUT electrically connected to a socket includes a first temperature adjustment device that supplies a fluid to an internal space in either the socket or a contact member that contacts the DUT when the DUT is pressed against the socket and a second temperature adjustment device that adjusts a temperature of an atmosphere in a chamber in which the socket and the contact member are disposed. The first temperature adjustment device includes a first supplier that supplies a first fluid and includes one or more connectors connected to one or more supply sources that supply the first fluid and a heat exchanger disposed between the one or more connectors and the internal space. The heat exchanger has a heat exchange part exposed in the chamber and exchanges heat between the first fluid and the atmosphere in the chamber.
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