IMPROVED REFLECTOR FOR PROCESS CHAMBER
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Jul 20, 2023
filing date -
Jul 20, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
A modular reflective heating system for use in a process chamber is provided. The modular reflective heating system includes: a plurality of connectors; a plurality of lamps, each lamp connected to at least one of the connectors; a reflector including: a base; and a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions. Each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base. The modular reflective heating system further includes a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions.
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