SUBSTRATE TRANSFER APPARATUS USING UPPER AND LOWER MAGNETIC LEVITATION RAILS
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Nov 20, 2023
filing date -
Nov 20, 2023
priority date (Note) -
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Abstract
Disclosed is a substrate transfer apparatus including a moving plate including an upper magnetic levitation rail and a lower magnetic levitation rail, a processing chamber disposed adjacent to the moving plate and that processes a substrate, and a shuttle disposed between the upper magnetic levitation rail and the lower magnetic levitation rail, being moved on the moving plate, and that accommodates the substrate.
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