CERAMIC HEATER
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Jan 16, 2025
app pub date -
Apr 16, 2024
filing date -
Apr 16, 2024
priority date (Note) -
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Abstract
A ceramic heater includes: a ceramic plate having a wafer placement surface on its upper surface; a plurality of zones in the wafer placement surface; a zone heater embedded in the ceramic plate for each of the plurality of zones; a single temperature detector passage in the ceramic plate; and a single temperature detector (multi TC) in the temperature detector passage. The temperature detector passage extends from the inlet in a lower surface of the ceramic plate through each of the plurality of zones. The multi TC has a plurality of temperature detecting portions. The temperature detecting portions are positioned at measurement positions corresponding to the plurality of zones.
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