ACOUSTIC WAVE DEVICE
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United States of America
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Issued Date -
Jan 16, 2025
app pub date -
Sep 27, 2024
filing date -
Sep 27, 2024
priority date (Note) -
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Abstract
An acoustic wave device includes a support substrate including a space portion, a piezoelectric body layer on the support substrate, a functional electrode on the piezoelectric body layer and at least partially overlapping with the space portion in plan view along a lamination direction of the support substrate and the piezoelectric body layer, and a structure on the piezoelectric body layer and having a smaller coefficient of thermal linear expansion than the piezoelectric body layer. The structure includes a region located in a region of the piezoelectric body layer other than a region where the functional electrode is provided and that does not overlap with the space portion in the plan view.
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