Tunable Phase Shifter and Method for Manufacturing the Same and Tunable Phase Shifting Device
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United States of America
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Jan 16, 2025
app pub date -
Mar 18, 2022
filing date -
Mar 18, 2022
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Abstract
A tunable phase shifter and a method for manufacturing the same, and a tunable phase shifting device. The phase shifter includes a first substrate, a second substrate, and a tunable dielectric layer between the first substrate and the second substrate; the first substrate includes a first base substrate and a first electrode on the first base substrate; the second substrate includes a second base substrate and a second electrode on the second base substrate; an orthographic projection of the first electrode on the first base substrate is at least partially overlapped with an orthographic projection of the second electrode on the first base substrate, and sheet resistances of materials of the first electrode and the second electrode are both less than or equal to 0.024Ω/□.
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