Importance

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Abstract

A semiconductor device may include a substrate including an active pattern, a channel pattern on the active pattern, the channel pattern including semiconductor patterns vertically stacked to be spaced apart from each other, a gate electrode on the plurality of semiconductor patterns, a gate contact electrically connected to the gate electrode, a first metal layer on the gate contact, the first metal layer including a first conductive via and a first interconnection pattern on the first conductive via, a second metal layer on the first metal layer, the second metal layer including a second conductive via and a second interconnection pattern on the second conductive via, and a diffusion prevention pattern between the first interconnection pattern and the second conductive via. A level of a bottom surface of the diffusion prevention pattern may be lower than a level of the topmost surface of the first interconnection pattern.

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First Claim