SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT CONTROL DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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N/A
Issued Date -
Jan 16, 2025
app pub date -
Sep 26, 2024
filing date -
Sep 26, 2024
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A substrate transport system includes a transport section a first placement portion and a second placement portion, and a transfer robot, wherein the transfer robot includes a main body unit disposed inside a transfer section, a turning support unit connected to the main body unit, an arm support unit connected to the turning support unit, an arm unit connected to the arm support unit, and a holding unit connected to the arm unit, wherein the arm unit includes a first arm that is supported by the arm support unit and a second arm that supports the holding unit and is supported by the first arm, wherein the turning support unit rotates using a connection portion with the main body unit as a rotation shaft in a plan view, the arm support unit rotates using a connection portion with the turning support unit as a rotation shaft in a plan view.
First Claim
Other Claims data not available