ELECTRON BEAM DEVICE INCLUDING SCHOTTKY EMITTER AND METHOD OF OPERATING SCHOTTKY EMITTER
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United States of America
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Issued Date -
Jan 16, 2025
app pub date -
May 21, 2024
filing date -
May 21, 2024
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Abstract
An electron beam device includes a Schottky emitter that is capable of reproducing collapse of a shape of a facet in a short time without adding hardware. Also, a method of operating a Schottky emitter includes applying a first electric field to the Schottky emitter while heating the Schottky emitter at a first temperature, and then applying a second electric field to the Schottky emitter while heating the Schottky emitter at a second temperature. The first temperature is higher than an operation temperature of the Schottky emitter and the second temperature. The first electric field is equal to or higher than an operation electric field of the Schottky emitter and lower than the second electric field. The second temperature is equal to or higher than the operation temperature and lower than the first temperature. The second electric field is higher than the operation electric field and the first electric field.
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