IMAGE STABILIZATION FOR DIGITAL LITHOGRAPHY

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250021016A1
SERIAL NO

18898943

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Abstract

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The present disclosure provides methods and systems for correcting the shooting of images from a spatial light modulator (SLM) to a substrate, when cross-scan vibrations, including sub-pixel cross-scan vibrations, are present. The methods and systems include shifting a mask pattern on an SLM rotated relative to the in-scan direction of travel on a substrate, shifting along an axis of the SLM to correct for cross-scan vibrations, and either delaying, or accelerating, the shooting of the mask pattern onto the substrate.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BENCHER, Christopher Dennis Santa Clara, US 100 4880
LAIDIG, Thomas L Richmond, US 49 402

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