PULSED LIGHT GENERATION DEVICE, PULSED LIGHT GENERATION METHOD, AND PROCESSING DEVICE

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United States of America

APP PUB NO 20250020969A1
SERIAL NO

18714710

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Abstract

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A pulsed light generation device includes a nonlinear optical crystal configured to cause first pulsed light emitted from a pulsed light source to enter, and to emit second pulsed light obtained by wavelength-converting the first pulsed light, and a diffraction grating that is disposed on an advancing path of the second pulsed light emitted from the nonlinear optical crystal and that is configured to emit third pulsed light obtained by reducing a ratio of an amount of change in pointing with respect to an amount of change in frequency of the entered pulsed light.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
TOKUHISA, Akira Tokyo, JP 27 118

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