DIFFUSERS IN VAPORIZERS AND RELATED METHODS
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United States of America
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Issued Date -
Jan 16, 2025
app pub date -
Jul 9, 2024
filing date -
Jul 9, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
Diffuser plates in vaporizers, and related systems and methods, are provided. A vaporizer comprises a vessel having an outlet. The vessel contains or is configured to contain a vaporizable precursor that, when vaporized, produces a precursor vapor. The vessel discharges or is configured to discharge the precursor vapor through the outlet. The vaporizer includes a diffuser located within the vessel, between the vaporizable precursor and the outlet. The diffuser has a first surface, a second surface opposite the first surface, and a plurality of holes extending from the first surface of the diffuser through to the second surface of the diffuser.
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