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Abstract

Electrostatically-excited hermetic multi-cell microelectromechanical actuator and production method thereof The present invention discloses an electrostatically excited microelectromechanical actuator and its fabrication method. The structure of the actuator comprises a set of electrostatic-capacitive cells that, when electrostatically excited, create local torques. The perimeter-fixed and excited cell structure deforms in a variety of ways in the vertical direction over a range of several or tens of micrometers, thus allowing to perform functions of an AFM sensor or micro-fluidic controls. The advantages of such a perimeter clamped structure are higher operating frequencies, higher AFM imaging throughput and higher output energies. Also, it is inherently hermetic, making it less sensitive to contamination and it is less damped when the actuator operates in liquids. All embodiments of the invention can be fabricated using CMOS-compatible MEMS micromachining technology based on wafer bonding and bulk micromachining processes.

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First Claim