LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS
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United States of America
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Issued Date -
Jan 9, 2025
app pub date -
Jun 28, 2024
filing date -
Jun 28, 2024
priority date (Note) -
Published
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Abstract
A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.

First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
KLA CORPORATION | ONE TECHNOLOGY DRIVE MILPITAS CA 95035 |
International Classification(s)

- [Classification Symbol]
- [Patents Count]
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Bezel, Ilya | Mountain View, US | 73 | 532 |
Khodykin, Oleg | Santa Cruz, US | 24 | 328 |
Korneev, Boris | Milpitas, US | 1 | 0 |
Rerikh, Vitaliy | Milpitas, US | 1 | 0 |
Stepanov, Andrey Evgenievich | Moscow, RU | 6 | 5 |
Zakirov, Andrey | Milpitas, US | 1 | 0 |
Zvedenuk, Leonid Borisovich | Moscow, RU | 7 | 95 |
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