LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250016905A1
SERIAL NO

18759284

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Mountain View, US 73 532
Khodykin, Oleg Santa Cruz, US 24 328
Korneev, Boris Milpitas, US 1 0
Rerikh, Vitaliy Milpitas, US 1 0
Stepanov, Andrey Evgenievich Moscow, RU 6 5
Zakirov, Andrey Milpitas, US 1 0
Zvedenuk, Leonid Borisovich Moscow, RU 7 95

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