ACTIVE GAS GENERATION APPARATUS
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Jan 9, 2025
app pub date -
Oct 20, 2022
filing date -
Oct 20, 2022
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
In an electrode unit of an active gas generation apparatus according to the present disclosure, a dielectric film support member includes a support surface supporting a high voltage side dielectric film from a lower side. A lower surface of the dielectric film suppression member provided on an upper side of a ground side dielectric film includes a dielectric contact region overlapped with a peripheral region of the high voltage side dielectric film and the support surface of the dielectric film support member in a plan view and a dielectric non-contact region overlapped with an intermediate region of the high voltage side dielectric film in a plan view. The high voltage side dielectric film is suppressed from the dielectric contact region on an upper side by the dielectric film suppression member receiving suppress strength of a plurality of suppression auxiliary members.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully