III-V/SI HYBRID MOS OPTICAL MODULATOR WITH A TRAVELING-WAVE ELECTRODE
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United States of America
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Jan 9, 2025
app pub date -
Nov 11, 2021
filing date -
Nov 11, 2021
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Abstract
A III-V/Si hybrid MOS optical modulator with a traveling-wave electrode for high-efficiency and high-bandwidth optical modulation is disclosed. The III-V/Si hybrid MOS optical modulator equipped with a traveling-wave electrode becomes a traveling-wave modulator. The traveling-wave modulator comprises a III-V compound semiconductor layer, a silicon layer and an oxide layer between the III-V compound semiconductor layer and the silicon layer. The traveling-wave modulator comprises of at least one first metallic layer, at least one second metallic layer and a semiconductor layer. The electrode trace width of each second metallic layer and the spacing between adjacent second metallic layers are adjusted to achieve the impedance and velocity matching. A traveling-wave electrode is designed to integrate with the III-V/Si hybrid MOS optical modulator under forward and reverse bias.
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