SPECTRAL FEATURE CONTROL APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250013066A1
SERIAL NO

18889787

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mason, Eric Anders San Diego, US 20 26

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