SYSTEMS AND STRUCTURES FOR VENTING AND FLOW CONDITIONING OPERATIONS IN INSPECTION SYSTEMS
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United States of America
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Issued Date -
Jan 9, 2025
app pub date -
Oct 28, 2022
filing date -
Oct 28, 2022
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Abstract
Systems and structures for venting and flow conditioning operations in charged particle beam systems. In some embodiments, a system may include a chamber configured to provide a vacuum environment; a vent valve; and a mass flow controller coupled to the chamber on a first side of the mass flow controller and to the vent valve on a second side of the mass flow controller.
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