COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Jan 9, 2025
app pub date -
Sep 24, 2024
filing date -
Sep 24, 2024
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
There is provided that a cooling device for cooling a cooling target, including a circulation system configured to circulate a refrigerant for cooling the cooling target, wherein a container including a region where heat is exchanged between the refrigerant and at least a part of the cooling target is provided in the circulation system, the refrigerant is a mixed refrigerant obtained by mixing a first refrigerant of a first boiling point and a second refrigerant of a second boiling point higher than the first boiling point, the circulation system circulates the mixed refrigerant so that the mixed refrigerant enters the container at a predetermined temperature, and the first refrigerant has a vapor pressure higher than a pressure resistance of the container at the predetermined temperature.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully