Importance

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Abstract

Techniques disclosed herein relate to sol-gel materials that include at least one metal halide precursor and at least one alcohol. After being annealed, the metal in the metal halide is in at least two different oxidation states, both of which are stable and transparent to visible light. By producing a mixture of the same metal in multiple oxidation states that are all transparent to visible light, an amorphous state of the sol-gel material without any noticeable domain formation that would otherwise distribute stress locally and lead to voiding inside nano-gratings to be overcoated is obtained. Highly condensed states of the sol-gel have refractive index values in the 1.7-2.2 range, without sacrificing recessed-feature fill.

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First Claim