ROBOT AND ELECTRONIC SUBSTRATE TRANSFER DEVICE
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United States of America
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Issued Date -
Jan 9, 2025
app pub date -
Jul 3, 2024
filing date -
Jul 3, 2024
priority date (Note) -
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Abstract
A robot include: an articulated arm including. The articulated arm include: a hand; a base; an arm; and a plurality of joints arranged along the arm. The plurality of joints are driven respectively around rotational axes. At least a part of the articulated arm is accommodated in a chamber having an opening. The robot further includes a flange extending between the base and the arm to cover the opening of the chamber. The flange has a longitudinal orientation. A rotational axis of the rotational axes proximate to the base is located between one end of the flange and a center of the flange in the longitudinal orientation. A distance from the rotational axis to the one end of the flange is less than a distance from the vertical axis to the center of the flange in the longitudinal orientation.
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