ROBUST BULK ACOUSTIC WAVE RESONATOR CAPACITOR
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United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Jun 21, 2024
filing date -
Jun 21, 2024
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Abstract
A bulk acoustic wave resonator configured as a capacitor has a piezoelectric structure including a mesa region suspended above a substrate to define a cavity. The piezoelectric structure includes a perimeter region surrounding a perimeter of the mesa region with a sloping portion that gradually slopes towards the substrate and a connecting portion proximate the substrate that supports the piezoelectric structure with respect to the substrate. The piezoelectric structure incudes a bottom electrode layer, a top electrode layer, and a piezoelectric layer therebetween. An overlapping region where the bottom electrode layer and the top electrode layer overlap extends across at least a width of the mesa region between opposing sides of the perimeter region.
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