TRANSVERSELY-EXCITED BULK ACOUSTIC RESONATOR SPLIT LADDER FILTER
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United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Sep 4, 2024
filing date -
Sep 4, 2024
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Abstract
A filter device is proved that includes a first chip having a first interdigital transducer (IDT) of a first bulk acoustic resonator at a first piezoelectric plate, the first IDT disposed on a portion of the first piezoelectric plate over a first cavity of the first bulk acoustic resonator, and a second chip having a second IDT of a second bulk acoustic resonator formed at a second piezoelectric plate, the second IDT disposed on a portion of the second piezoelectric plate over a second cavity of the second bulk acoustic resonator. The filter device includes a circuit card coupled to the first chip and the second chip. A thickness of the first piezoelectric plate is greater than a thickness of the second piezoelectric plate.
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