ENHANCING TEMPERATURE STABILITY IN REFERENCE CLOCK APPLICATIONS USING RESONATOR ARRAYS
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United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Jun 23, 2023
filing date -
Jun 23, 2023
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Abstract
Embodiments herein relate to a reference clock that includes an array of resonators with different turnover temperatures. The resonators may be Microelectromechanical Systems (MEMS) resonators with different doping concentrations, or quartz crystal resonators with different cut angles, for example. For MEMS resonators in particular, the turnover temperature can be adjusted by providing an overlying oxide layer with different thicknesses. In another approach, the resonators are piezoelectric-on-silicon resonators with different finger pitch-to-thickness ratios. A control circuit obtains a sensed temperature from a temperature sensor and selects one of the resonators having a turnover temperature in a temperature range corresponding to the sensed temperature. Each resonator may have a turnover temperature in a different temperature range. The resonators may have separate drivers or have a common driver.
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