CMOS RF-MEMS CAPACITIVE SWITCH IMPLEMENTATIONS
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United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Jun 17, 2024
filing date -
Jun 17, 2024
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Abstract
A RF-MEMS capacitive switch including a central apex and a plurality of cells. At least two of the plurality of cells are coupled to opposing sides of the central apex and each of the plurality of cells includes a rotor and a stator. At least one meander spring is coupled to an end of the central apex. The capacitive switch includes a top layer and a bottom layer.
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