SCANNING PROBE MICROSCOPE
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United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Mar 16, 2022
filing date -
Mar 16, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A control device is configured to perform control to move the optical microscope from an initial position to a position at which the optical microscope is focused on the observation target while confirming the focus, store information capable of identifying a relative position between the optical microscope and the observation target in a focused state (S3), move the optical microscope to the relative position based on the stored information and then move the optical microscope to a position at which the optical microscope is focused on the observation target while confirming the focus.
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