Inertial Sensor
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Sep 5, 2023
filing date -
Sep 5, 2023
priority date (Note) -
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Abstract
The present application provides an inertial sensor, which comprising an anchor point, a first sensing proof mass, and a second sensing proof mass. The first sensing proof mass and the second sensing proof mass are connected with the anchor point by a corresponding flexible member. Each of the first sensing proof mass and the second sensing proof mass is provided with a groove to create mass imbalance on two sides of the flexible member for sensing accelerations in an out-of-plane direction. By mounting electrodes in a plane direction and in the grooves, in-plane accelerations orthogonal to each other are sensed.
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