METHODS RELATED TO GRADIENT RAISED FRAMES IN FILM BULK ACOUSTIC RESONATORS
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United States of America
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Dec 19, 2024
app pub date -
Jun 28, 2024
filing date -
Jun 28, 2024
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Abstract
Methods related to gradient raised frames in film bulk acoustic resonators. According to certain aspects, a method for fabricating a film bulk acoustic resonator device can include: forming a first metal layer over a substrate; forming a piezoelectric layer; forming a second metal layer, the piezoelectric layer positioned between the first and second metal layers; and forming a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.
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