SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

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United States of America

APP PUB NO 20240421213A1
SERIAL NO

18813074

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Abstract

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A semiconductor device includes a gate structure on a substrate, a first spacer on sidewalls of gate structure, a second spacer on sidewalls of the first spacer, a polymer block adjacent to the first spacer and on a corner between the gate structure and the substrate, an interfacial layer under the polymer block, and a source/drain region adjacent to two sides of the first spacer. Preferably, the polymer block is surrounded by the first spacer, the interfacial layer, and the second spacer.

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Patent Owner(s)

Patent OwnerAddress
UNITED MICROELECTRONICS CORPNO 3 LI-HSIN ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU CITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chuang, Fu-Jung Kaohsiung city, TW 23 46
Chuang, Po-Jen Kaohsiung City, TW 29 336
Hsu, Chi-Mao Tainan City, TW 88 536
Kuo, Chia-Ming Kaohsiung City, TW 64 693
Lu, Tsuo-Wen Kaohsiung City, TW 50 547

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