VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHOD OF PROCESSING
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United States of America
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Issued Date -
Dec 19, 2024
app pub date -
Jun 12, 2024
filing date -
Jun 12, 2024
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Abstract
A vertical furnace and a method for processing a plurality of substrates in said vertical furnace is disclosed. Embodiments of the presently described vertical furnace comprise a process chamber, a heating element configured to provide the heat to reach the desired process temperature for the processing of the plurality of substrates. The vertical furnace may further comprise heat distributing member for distributing the heat provided by the heating element. Embodiments of the presently described method comprise processing the plurality of substrates in a vertical furnace described herein.
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