METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES INTO A SUBSTRATE, IN PARTICULAR INTO A SUBSTRATE FOR AN OPTICAL ELEMENT, METHOD AND SUBSTRATE FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, PROCESSING SYSTEM AND ALSO APPARATUS PERTAINING TO SEMICONDUCTOR TECHNOLOGY AND STRUCTURED ELECTRONIC COMPONENT

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United States of America

APP PUB NO 20240419066A1
SERIAL NO

18744033

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Abstract

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In a method for incorporating temperature-regulating hollow structures into a substrate, in particular into a substrate for an optical element, such as a mirror for an EUV projection exposure apparatus, there are the following steps: (A) providing a substrate; (B) progressively focusing a processing light beam on ablation locations at which temperature-regulating hollow structures are intended to arise; (C) a scanning process is carried out in which the processing light beam is guided with a focus in such a way that an ablation focus is moved along a scanning trajectory; (D) the scanning trajectory comprises a plurality of scanning patterns; (E) the scanning positions are spaced apart from one another in a longitudinal direction of the temperature-regulating hollow structure to be produced; and (F) the scanning trajectory additionally comprises pattern jump paths.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BIELKE, Uwe Oberkochen, DE 1 0
DAUTH, Markus Oberkochen, DE 1 0
DIER, Oliver Oberkochen, DE 13 33
FAAS, Sebastian Oberkochen, DE 3 0
FETZER, Matthias Oberkochen, DE 2 0
GATZEN, Caren Oberkochen, DE 2 0
HERMANN, Ingo Oberkochen, DE 14 139
HUSSEIN, Rudy Oberkochen, DE 1 0
LENZ, Daniel Oberkochen, DE 5 8
METTENLEITER, Luca Oberkochen, DE 1 0
MYSLIWITZ, Eric Oberkochen, DE 1 0
NOLTE, Stefan Oberkochen, DE 15 59
PFLANZ, Ulrich Oberkochen, DE 1 0
ROSS, Benjamin Oberkochen, DE 15 39
RUCK, Simon Oberkochen, DE 2 0
SEIFERT, Andreas Oberkochen, DE 32 164
SULEIMAN, Samer Oberkochen, DE 2 0
ULLSPERGER, Tobias Oberkochen, DE 3 0
ZIPFEL, Jonas Oberkochen, DE 2 0

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