SCANNING PROBE MICROSCOPE, INFORMATION PROCESSING METHOD, AND PROGRAM
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United States of America
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Issued Date -
Dec 19, 2024
app pub date -
Mar 24, 2022
filing date -
Mar 24, 2022
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Abstract
A scanning probe microscope is equipped with an observation device for observing a sample containing particles and an information processing device. The information processing device generates one or more observation images based on observation data acquired by observing a sample with the observation device, calculates a particle parameter indicating a diameter of a particle image or the number of the particle images, the particle image being included in the observation image, and executes predetermined processing when an observation image including an image in which the particle parameter is outside a predefined observation range is included in one or more observation images.
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