CALIBRATION SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 19, 2024
app pub date -
Aug 29, 2024
filing date -
Aug 29, 2024
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Abstract
A calibration system is of a wafer processing system. The calibration system includes a calibration substrate configured to be disposed on a plurality of support structures of the wafer processing system. The calibration substrate includes a calibration pin. The calibration substrate enables a calibration operation of a robot arm of the wafer processing system to automatically determine robot arm error of the robot arm.
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