METHOD FOR PRODUCING A TEMPERATURE-CONTROLLING HOLLOW STRUCTURE IN A SUBSTRATE USING A PROCESSING LIGHT BEAM

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United States of America

APP PUB NO 20240416461A1
SERIAL NO

18743344

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Abstract

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In the case of a method for producing a temperature-controlling hollow structure in a substrate, first of all a substrate consisting of a substrate material is provided. The substrate is surveyed in order to ascertain where inclusions are in the substrate. Then, a temperature-controlling hollow structure is worked into the substrate by focusing a processing light beam with a beam axis aligned along a standard direction successively onto processing locations at which the temperature-controlling hollow structure is to be produced. As a result, the substrate material is modified or removed at the processing locations. If an inclusion is on the beam axis aligned along the standard direction, the direction of the beam axis relative to the mirror substrate is changed such that the beam axis does not intersect the inclusion.

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Patent Owner(s)

Patent OwnerAddress
ZEISS CARL SMT GMBHRUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN

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  • 2024 Application Filing Year
  • B23K Class
  • 952 Applications Filed
  • 30 Patents Issued To-Date
  • 3.16 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Faas, Sebastian Oberkochen, DE 3 0
Freimann, Rolf Oberkochen, DE 53 628
Gatzen, Caren Oberkochen, DE 2 0
Gruner, Toralf Oberkochen, DE 173 1727
Ruck, Simon Oberkochen, DE 2 0
Seifert, Andreas Oberkochen, DE 32 164
Suleiman, Samer Oberkochen, DE 2 0
Ullsperger, Tobias Oberkochen, DE 3 0
Weber, Rudolf Oberkochen, DE 24 179
Zipfel, Jonas Oberkochen, DE 2 0

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges18354401 - 10010020030040050060070080090010001100120013001400150016001700180019002000

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