METHOD FOR PRODUCING A TEMPERATURE-CONTROLLING HOLLOW STRUCTURE IN A SUBSTRATE USING A PROCESSING LIGHT BEAM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 19, 2024
app pub date -
Jun 14, 2024
filing date -
Jun 14, 2024
priority date (Note) -
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Abstract
In the case of a method for producing a temperature-controlling hollow structure in a substrate, first of all a substrate consisting of a substrate material is provided. The substrate is surveyed in order to ascertain where inclusions are in the substrate. Then, a temperature-controlling hollow structure is worked into the substrate by focusing a processing light beam with a beam axis aligned along a standard direction successively onto processing locations at which the temperature-controlling hollow structure is to be produced. As a result, the substrate material is modified or removed at the processing locations. If an inclusion is on the beam axis aligned along the standard direction, the direction of the beam axis relative to the mirror substrate is changed such that the beam axis does not intersect the inclusion.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ZEISS CARL SMT GMBH | RUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN |
International Classification(s)

- 2024 Application Filing Year
- B23K Class
- 952 Applications Filed
- 30 Patents Issued To-Date
- 3.16 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Faas, Sebastian | Oberkochen, DE | 3 | 0 |
# of filed Patents : 3 Total Citations : 0 | |||
Freimann, Rolf | Oberkochen, DE | 53 | 628 |
# of filed Patents : 53 Total Citations : 628 | |||
Gatzen, Caren | Oberkochen, DE | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Gruner, Toralf | Oberkochen, DE | 173 | 1727 |
# of filed Patents : 173 Total Citations : 1727 | |||
Ruck, Simon | Oberkochen, DE | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Seifert, Andreas | Oberkochen, DE | 32 | 164 |
# of filed Patents : 32 Total Citations : 164 | |||
Suleiman, Samer | Oberkochen, DE | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Ullsperger, Tobias | Oberkochen, DE | 3 | 0 |
# of filed Patents : 3 Total Citations : 0 | |||
Weber, Rudolf | Oberkochen, DE | 24 | 179 |
# of filed Patents : 24 Total Citations : 179 | |||
Zipfel, Jonas | Oberkochen, DE | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 |
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Patent Citation Ranking
- 0 Citation Count
- B23K Class
- 0 % this patent is cited more than
- 1 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jun 19, 2028 |
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