METHODS FOR FABRICATING A VERTICAL CAVITY SURFACE EMITTING LASER
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United States of America
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Dec 12, 2024
app pub date -
Oct 24, 2022
filing date -
Oct 24, 2022
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Abstract
Methods for fabricating a vertical cavity surface emitting laser (VCSEL) using epitaxial lateral overgrowth (ELO). The ELO layers comprise island-like III-nitride semiconductor layers grown on a substrate using a growth restrict mask, wherein the island-like III-nitride semiconductor layers comprise a light emitting resonant cavity. An aperture for the resonant cavity is fabricated on a wing of the ELO layers with distributed Bragg reflector (DBR) mirrors formed on bottom and top regions of the wing of the ELO layers.
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