LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America
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Issued Date -
Dec 12, 2024
app pub date -
Aug 16, 2024
filing date -
Aug 16, 2024
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Abstract
A line narrowing laser device includes an optical element and a diffractive optical element positioned on an optical path of an optical resonator, a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element, a wavelength driver configured to drive the wavelength actuator, a processor configured to output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes, and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.
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