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Abstract

Specimen imaging systems and methods including a sample stage in a vacuum environment. The sample stage is configured to support a specimen, an electron beam generator configured to focus an electron beam on a first predetermined location on the specimen, a nanospray dispenser configured to dispense a nanospray onto a second predetermined location on the specimen, a mass spectrometer, and an extraction conduit configured to extract a plume of charged particles generated as a result of contact between the nanospray and the specimen and deliver the charged particles to the mass spectrometer. The systems and methods can create a topological and chemical map of the specimen by analyzing at least a portion of the specimen with a mass spectrometer to determine a chemical composition of the specimen at the second predetermined location and analyzing at least a portion of the specimen with the electron beam to determine a surface topology.

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First Claim