METROLOGY DEVICE AND METHOD
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United States of America
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Issued Date -
Dec 12, 2024
app pub date -
Oct 7, 2022
filing date -
Oct 7, 2022
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Abstract
A metrology device for determining metrological characteristics of a sample is described that includes a probe, a scanning mechanism, a radiation source, an optical sensor and a signal processor. In operation the scanning mechanism displaces the probe relative to the sample, along a surface of the sample. The probe has a diamond tip with one or more nitrogen-vacancy centers and is irradiated by the radiation source with photon radiation to excite the diamond tip to emit fluorescent light. The optical sensor provides a sense signal indicative of an intensity of the emitted fluorescent light and the signal processor processes the sense signal to compute at least one characteristic of a feature present in the sample.
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