MANUFACTURING MEHTOD AND STRUCTURE OF MICRO HEATING AND SENSING DEVICE

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APP PUB NO 20240410849A1
SERIAL NO

18679512

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Abstract

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A method of manufacturing a micro heating and sensing device and a device thereof are provided. The micro heating and sensing device includes a substrate, a first electrode layer, a first connection electrode layer, a conductive layer, a second connection electrode layer, and a second electrode layer. By replacement of one end of the metal electrode or the entire metal electrode with conductive oxides or conductive nitrides, problems of micro heating and sensing devices available now including poor contact in electrode connections and needs of passivation layers disposed at the rear end of the electrodes can be overcome. Both cost and time for manufacturing process are reduced.

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Patent Owner(s)

Patent OwnerAddress
GUO GUANG JENot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guo, Guang-Je Hsinchu County, TW 1 0

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