Importance

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Abstract

A force detection device includes a force sensor to which a load is applied. The force sensor includes a base, a first circuit formation layer, a sensor layer, and a second circuit formation layer stacked in order, the first circuit formation layer includes a first surface facing the sensor layer, a plurality of first detection electrodes disposed on the first surface, and a plurality of first individual detection regions divided corresponding to the first detection electrodes, and the second circuit formation layer includes a second surface facing the sensor layer, a detection surface facing opposite to the second surface and to which the load is applied, a plurality of second detection electrodes disposed on the second surface, and a plurality of second individual detection regions divided corresponding to the second detection electrodes.

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First Claim