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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
LAM RES CORP	4650 CUSHING PARKWAY FREMONT CALIFORNIA 94538 94538

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Gupta, Awnish	Hillsboro, US	21	31
Henri, Jon	West Linn, US	68	10895
Savchak, Oksana	Tualatin, US	3	1
Srinivasan, Easwar	Portland, US	42	3866
van, Schravendijk Bart J	Palo Alto, US	91	8614
Wei, Fengyan	Meridian, US	4	1

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Jun 12, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jun 12, 2032
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jun 12, 2036

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0410,053

CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILANE PRECURSORS

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