HAFNIUM PRECURSORS AND RELATED METHODS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240409430A1
SERIAL NO

18679227

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A precursor vessel comprises a hafnium halide precursor. The hafnium halide precursor comprises less than 1 ppm of at least one impurity. The at least one impurity comprises at least one of a titanium contaminant, a chromium contaminant, an aluminum contaminant, an iron contaminant, or any combination thereof. Related systems and related methods are also provided, including, for example and without limitation, systems for delivery of vapor precursors, methods for purifying a precursor, and the like.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Battle, Scott L Cedar Park, US 41 2042
Calhoun, Matthew W Burnet, US 1 0
Garrett, Benjamin R Leander, US 10 0
Goggans, Wesley W Meadowlakes, US 1 0
Valdez, Juan Copperas Cove, US 5 71
Watson, Michael Leander, US 39 191

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges27018001 - 10020040060080010001200140016001800200022002400260028003000

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