HAFNIUM PRECURSORS AND RELATED METHODS
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 12, 2024
app pub date -
May 30, 2024
filing date -
May 30, 2024
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Abstract
A precursor vessel comprises a hafnium halide precursor. The hafnium halide precursor comprises less than 1 ppm of at least one impurity. The at least one impurity comprises at least one of a titanium contaminant, a chromium contaminant, an aluminum contaminant, an iron contaminant, or any combination thereof. Related systems and related methods are also provided, including, for example and without limitation, systems for delivery of vapor precursors, methods for purifying a precursor, and the like.
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ENTEGRIS INC | 129 CONCORD ROAD BILLERICA MA 01821 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Battle, Scott L | Cedar Park, US | 41 | 2042 |
# of filed Patents : 41 Total Citations : 2042 | |||
Calhoun, Matthew W | Burnet, US | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Garrett, Benjamin R | Leander, US | 10 | 0 |
# of filed Patents : 10 Total Citations : 0 | |||
Goggans, Wesley W | Meadowlakes, US | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Valdez, Juan | Copperas Cove, US | 5 | 71 |
# of filed Patents : 5 Total Citations : 71 | |||
Watson, Michael | Leander, US | 39 | 191 |
# of filed Patents : 39 Total Citations : 191 |
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