HIGH MOBILITY TFT DRIVING DEVICE AND MANUFACTURING METHOD THEREOF
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United States of America
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Issued Date -
Dec 5, 2024
app pub date -
Jun 8, 2023
filing date -
Jun 8, 2023
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Abstract
The present invention relates to a high-mobility driving element and a method for manufacturing same, the high-mobility driving element comprising: a substrate; an insulating film disposed on the substrate; a channel layer disposed on at least a partial region of the insulating film and including a metal oxide; a source electrode and a drain electrode connected to the channel layer and disposed on the insulating film and either side of the channel layer to face each other; and a protective layer covering all of the channel layer, the source electrode, and the drain electrode, wherein the channel layer comprises a plurality of fluorinated regions in at least a partial region between the source electrode and the drain electrode.
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