METHODS AND SYSTEMS FOR IMPROVING PLASMA IGNITION STABILITY
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United States of America
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Dec 5, 2024
app pub date -
Jul 29, 2024
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Jul 29, 2024
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Abstract
Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering signals that generate the electromagnetic field. This scheme provides a stable and efficient method of plasma ignition.
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